| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a miniaturizable chopper heightening an S/N ratio of light received by a photodetector, and to provide a miniaturizable optical analyzer having high analysis accuracy. <P>SOLUTION: A THC measuring device 100 includes an infrared lamp 10 for generating light, a spectrometer 20 for fluctuating a wavelength of light periodically, a photodiode 30 for detecting intensity of light, a gas container storing measuring object gas 1 and transmissible by light generated from the infrared lamp 10, and an optical chopper 50. The optical chopper 50 includes; a MEMS chopper member 51 having a base part 51a on which an opening part 51c transmissible by light is formed, and a rotation part 51b for switching to either state of a light transmissible state and a light blocking state by being rotated corresponding to a voltage application state; and a slit member 56 on which a slit 56a for narrowing the light is formed. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
