| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for producing a sheet with metallic compound thin film which can form the thin film on a sheet surface at a high speed so that the film thickness of the sheet width direction is made uniform even in a relatively thick metallic compound thin film, and to provide a method for producing the sheet with metallic compound thin film. SOLUTION: The apparatus for producing the sheet with metallic compound thin film is provided with: a conveyance means conveying a sheet in accordance with the movement of a sheet guide face 3; an evaporation source 7 scattering metal vapor toward the sheet on the sheet guide face; a reaction gas introduction means 15 introducing a gas for being reacted with the metal vapor; and a mask 11a limiting a region at which the metal vapor reaches the sheet, and in which a metallic compound thin film is continuously formed on the sheet to be conveyed. Regarding a linear direction in which the evaporation source and the sheet guide face are connected, the position at which the gas introduced by the reaction gas introduction means and the metal vapor flown from the evaporation source are intermingled is provided with a diffusion preventing means 20 preventing the diffusion of the metal vapor to the outside in the sheet width direction. COPYRIGHT: (C)2010,JPO&INPIT |
