| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress leakage of stray light to a diffraction grating side, to enable formation of a shape of the diffraction grating having a concavo-convex shape with high accuracy, and to readily and reliably perform test for checking whether the shape has been formed with high accuracy. Ž<P>SOLUTION: The diffraction grating in which at least a part of a film formed on a principal face of one side of a substrate is formed by pattern forming and whose cross-sectional shape is formed into a concavo-convex shape, by arranging a convex part and a concave part alternately and repeatedly is provided; utilization light of the diffraction element enters the part where the concavo-convex shape is formed; and an upper face of the convex part and a bottom face of the concave part have different reflectance with respect to an irradiated light of a predetermined wavelength. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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