摘要 |
A semiconductor device according to one embodiment includes: adjacent first and second transistors each formed on a semiconductor substrate, the first and second transistors respectively having first and second gate electrodes and sharing a source/drain region therebetween; a first insulating film formed on the first gate electrode; a second insulating film formed on the second gate electrode and comprising a region thicker than the first insulating film; and a self-aligned contact plug connected to the source/drain region, a horizontal distance from a center position of the self-aligned contact plug to the second gate electrode being less than a horizontal distance from a center position between the first and second gate electrodes to the second gate electrode.
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