发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 A semiconductor device according to one embodiment includes: adjacent first and second transistors each formed on a semiconductor substrate, the first and second transistors respectively having first and second gate electrodes and sharing a source/drain region therebetween; a first insulating film formed on the first gate electrode; a second insulating film formed on the second gate electrode and comprising a region thicker than the first insulating film; and a self-aligned contact plug connected to the source/drain region, a horizontal distance from a center position of the self-aligned contact plug to the second gate electrode being less than a horizontal distance from a center position between the first and second gate electrodes to the second gate electrode.
申请公布号 US2010224936(A1) 申请公布日期 2010.09.09
申请号 US20100683037 申请日期 2010.01.06
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HOKAZONO AKIRA
分类号 H01L27/088;H01L21/8234 主分类号 H01L27/088
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