摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of efficiently manufacturing an iron nitride magnetic fine particle excellent in magnetic characteristics by shortening time required for reduction-nitriding. <P>SOLUTION: In the method of manufacturing an iron nitride magnetic fine particle, at first, an iron oxide fine particle is prepared (first step). Then, a reduction treatment for the iron oxide fine particle is performed using plasma containing hydrogen and an α-Fe metal fine particle is formed from the iron oxide fine particle (second step). A nitriding treatment for the α-Fe metal fine particle is performed using plasma containing nitrogen and an Fe<SB>16</SB>N<SB>2</SB>compound fine particle is formed from the α-Fe metal fine particle (third step). In the method of manufacturing the iron nitride magnetic fine particle, the α-Fe metal fine particle is not exposed to the air between the second step and the third step. <P>COPYRIGHT: (C)2010,JPO&INPIT |