| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid ejecting head capable of obtaining excellent displacement characteristics, and to provide a method of manufacturing an actuator device. <P>SOLUTION: The method for manufacturing a liquid ejecting head includes: a step of forming a first electrode; a step of forming a piezoelectric precursor film on the first electrode; a first heating step of forming a piezoelectric film by crystallizing the piezoelectric precursor film by heat treatment; a step of forming a second electrode; and a second heating step of heating the piezoelectric layer composed of the piezoelectric film at a temperature of 150°C or more while applying a voltage between the first electrode and the second electrode. <P>COPYRIGHT: (C)2010,JPO&INPIT |
