| 摘要 |
In a comparison between master data created from a waveform signal of an observed object of an acceptable article and a waveform signal obtained from a non-measured observed object, time phase difference generated in the observed object is corrected, and difference with the master data is detected. As a first stage, quality determination is performed on the non-measured observed object with a long interval master data using the created master data, and the time phase difference is corrected. Then, as a second stage, quality determination is performed with the short interval master data divided on a time axis and the similarly divided waveform signal of the observed object. The time phase difference generated between the observed objects (acceptable article and defective article) is thereby corrected, and quality determination of high accuracy can be performed from the comparison with the waveform signal of the acceptable article.
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