| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor achieving a highly efficient thin-film polycrystalline silicon (Si) solar cell on a glass substrate. Ž<P>SOLUTION: The method of manufacturing a semiconductor for a solar cell includes: the steps for forming on the glass a large grain size polycrystalline silicon (Si) thin film subjected to orientation control to (110) and (111) by using a solid continuous wave laser excited by semiconductor (excited by diode), and directly growing the polycrystalline silicon Si layer while using the above Si film as a seed crystal. After that, this thin film is irradiated with an energy beam in condition that the Si layer is not molten and Si is grown in solid phase. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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