| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storage container capable of floating a substrate from the shelf board of the container body in an appropriate manner, and of suppressing pressure increase when press-fitting a cover into the front surface portion of the container body that has been opened; and to provide a method to pick out a substrate. SOLUTION: The substrate storage container includes a container body to accommodate semiconductor wafers W, and a cover that is interfitted and press-fitted into the front surface of the container body. On the back surface wall 2 of the container body, a support groove 3 of nearly U type cross section is formed that supports loose engagement in the back surface peripheral part of the semiconductor wafer W. Inside walls on both sides of the container body, teeth that support the side of the peripheral part of the semiconductor wafer W are formed. In the inner surface of the cover that counters the back surface wall 2 of the container body, a front retainer that holds the front of the peripheral part of the semiconductor wafer W is equipped. The support groove 3 is formed of a first inclined bottom surface 4 of moderate slope that guides levitation from the teeth of the semiconductor wafer W at the time of the interfit and press fit of the cover, and of a second inclined bottom surface 5 of steep slope that guides slipping down of the semiconductor wafer W to the teeth, when the cover is removed from the container body. COPYRIGHT: (C)2010,JPO&INPIT |
