| 摘要 |
The present invention provides a plasma generating system including a magnetron for generating microwave energy, a resonator attached to the magnetron and having a cavity to contain the microwave energy generated by the magnetron, and at least one nozzle secured to the resonator. The nozzle includes a housing having a generally cylindrical space formed therein, wherein the space forms a gas flow passageway; and a rod-shaped conductor disposed in the space and operative to transmit microwave energy along a surface thereof so that the microwave energy transmitting along the surface excites gas flowing through the space. A portion of the rod-shaped conductor extends into the cavity to capture the microwave energy in the cavity. The nozzle includes gas inlet structure configured to introduce gas into the cylindrical space to be excited into plasma
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