发明名称 LIGHT IRRADIATION DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To prevent self-weight deflection of an obliquely disposed mirror by a simple mechanism without decreasing planarity of the mirror. <P>SOLUTION: The light exiting from a lamp 2 is condensed by a condenser mirror 3 to irradiate a face 11 to be irradiated with the light via a first mirror 41, an integrator lens 7, a second mirror 42 and a collimator lens 8. The first mirror 41 and the second mirror 42 are obliquely disposed, which causes self-weight deflection. In order to correct the deflection, lever means 20a, 20b are disposed in the opposite sides to the reflecting faces of the mirrors 41, 42, respectively, to correct deflection by pushing the deflected portion or pulling up the deflected portion. The beam of the lever means 20a, 20b can be bent at the fulcrum. Thereby, the balance of the lever means is stabilized and a weight attached to the point of effort can be made light. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010197671(A) 申请公布日期 2010.09.09
申请号 JP20090042054 申请日期 2009.02.25
申请人 USHIO INC 发明人 NOMOTO KENTARO
分类号 G03F7/20;F21S2/00;H01L21/027 主分类号 G03F7/20
代理机构 代理人
主权项
地址
您可能感兴趣的专利