| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein no rotary actuator exists for simultaneously satisfying high torque performance in low heating, high speed drivability and high accuracy positioning controllability. SOLUTION: A control object 1 is joined with the rotary actuator 2 composed of a pneumatic actuator 21, an electromagnetic actuator 22 and a rotary encoder 23. The pneumatic actuator 21 is a vane type rocking actuator of high torque performance in low heating, and the electromagnetic actuator 22 is a voice coil motor of high speed drivability (high responsiveness) and high accuracy positioning controllability, and is arranged in parallel to the control object 1. COPYRIGHT: (C)2010,JPO&INPIT |
