| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress strain caused by the difference in linear expansion coefficient with a flow channel forming member with respect to a sensor substrate 5 of an air flowmeter. <P>SOLUTION: A bonding regionαbetween a support member 7 and the flow channel forming member and a projection regionβof the sensor substrate 5 onto a facing surface 17 do not include an overlapping region with respect to an axis a (namely, a region La and a region Ma do not overlap with each other). Thus, the sensor substrate 5 hardly receives the effect of a part caused by the linear expansion/contraction in the direction of the axis a from among stress transmitted from the flow channel forming member (namely, the effect of first cylinder deformation of the support member 7). The strain of the sensor substrate 5 is thereby suppressed because the first cylinder deformation is not generated in the sensor substrate 5. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
