ALUMINUM OXIDE SINTERED BODY, METHOD FOR PRODUCING THE SAME AND MEMBER FOR SEMICONDUCTOR PRODUCING APPARATUS

摘要

An aluminum oxide sintered body of the invention includes: europium and nitrogen; and plate-like crystals having peaks coinciding with EuAl12O19 in an X-ray diffraction profile dispersed over a whole sintered body. Such an aluminum oxide sintered body can be obtained by: forming a mixed powder containing an alumina powder, a europium compound powder and an aluminum nitride powder into a green body having a predetermined shape; and sintering the green body under a non-oxidizing atmosphere.