ACCELERATION SENSOR ELEMENT, ACCELERATION SENSOR DEVICE, AND METHOD FOR MANUFACTURING ACCELERATION SENSOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an acceleration sensor element for improving sensitivity by enlarging accessory parts.

SOLUTION: The acceleration sensor element 1 includes a fixed part 3 provided with an opening 13; a weight part 7 disposed in the opening 13; beam part 5 wherein one end is connected to the weight part 7 and the other end is connected to the fixed part 3; and resistance elements 9 disposed on the beam part 5 and having a resistance value changed along with deformation of the beam part 5. The weight part 7 includes a main part 15 to which the one end of the beam part 5 is connected; and the accessory parts 17 connected to the main part 15 and projecting toward the other end of the beams instead of the one end (an end of the main part 15 side) of the beam part 5. The accessory part 17 is separated from the beam part 5 by a first groove 25 opened toward one side (a first main surface Sa side) of an opening direction of the opening 13 and includes a thick base part 19 toward the other side (a second main surface Sb side) of the opening direction instead of the beam part 5. The accessory part 17 includes a jutting part 21 jutting from the base part 19 toward the beam part 5 at a position on the second main surface Sb side instead of the beam part 5.

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