发明名称 |
LAYERED SCANNING CHARGED PARTICLE APPARATUS PACKAGE HAVING AN EMBEDDED HEATER |
摘要 |
A scanning charge particle apparatus includes a layered charged particle beam column package; a sample holder; and a heater, such as a resistive heater, in one of the layers of the package that conductively heats layers and/or components.
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申请公布号 |
US2010224778(A1) |
申请公布日期 |
2010.09.09 |
申请号 |
US20100717919 |
申请日期 |
2010.03.04 |
申请人 |
MURAY LAWRENCE P;SPALLAS JAMES P |
发明人 |
MURAY LAWRENCE P.;SPALLAS JAMES P. |
分类号 |
H01J37/28;G01N23/22;H01J37/02;H01J37/20 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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