| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To avoid the necessity of installing a large-sized evaporator and ozone decomposition tank, and prevent ozone from being concentrated in a fluid containing ozone transferred to a cold storage tank, even if power failure, water failure, etc. should occur by preventing ozone from being concentrated over an explosion lower limit of ozone even in case of an abnormality, in a process of handling a fluid containing ozone, such as an oxygen isotope concentrating method. <P>SOLUTION: A mixture of liquefied ozone and liquefied CF<SB>4</SB>is introduced into a liquid receiving tank 10 in which liquefied CClF<SB>3</SB>is stored in advance to produce a mixture of liquefied CClF<SB>3</SB>, liquefied ozone and liquefied CF<SB>4</SB>in the liquid receiving tank. The obtained mixture is gradually heated and evaporated to produce a mixture gas. The mixture gas is introduced into the ozone decomposition tank 13. A mixture gas of oxygen, CClF<SB>3</SB>gas and CF<SB>4</SB>gas is fed to a first distillation column 14 to separate oxygen. Then, the CClF<SB>3</SB>gas and CF<SB>4</SB>gas are fed to a second distillation column 15 to separate into CClF<SB>3</SB>and CF<SB>4</SB>. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
