发明名称 THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE SAME, DISPLAY, AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a thin film transistor having excellent transistor characteristics, a method of manufacturing the same, a display, and a semiconductor device. SOLUTION: The thin film transistor includes: a gate electrode 2 formed on a substrate; a gate insulating film 3 covering the gate electrode; a semiconductor layer 4 formed on the gate insulating film 3 and disposed facing the gate electrode 2; a source electrode 7 and a drain electrode 8 formed on the semiconductor layer 4 through an n-type ohmic contact layer 6 containing n-type impurities; and a p-type semiconductor layer 5 formed between the n-type ohmic contact layer 6 under the source electrode 7 and the semiconductor layer 4 and between the n-type ohmic contact layer 6 under the drain electrode 8 and the semiconductor layer 4 respectively. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010199116(A) 申请公布日期 2010.09.09
申请号 JP20090039034 申请日期 2009.02.23
申请人 MITSUBISHI ELECTRIC CORP 发明人 TAKEGUCHI TORU
分类号 H01L29/786;G02F1/1368;H01L21/20;H01L21/336 主分类号 H01L29/786
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