发明名称 METHOD AND APPARATUS FOR MANUFACTURING MOLDING
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a mold with a fine and uneven pattern precisely and efficiently. SOLUTION: The method of manufacturing the mold includes the steps of: forming a resin layer that contains an active energy beam curable resin on one surface of a continuously conveyed flexible support body; molding an uneven pattern in the resin layer by feeding the flexible support body on which the resin layer is formed between the emboss roll and nip roll so that the resin layer comes into contact with the emboss roll and by sandwiching the flexible support body between the emboss roll and nip roll; and curing the resin layer by emitting the active energy beam onto the resin layer where the uneven pattern is molded. In the molding step, the uneven pattern is molded in the resin layer so that the width of the nip formed between the emboss roll and nip roll is 3 mm or less when sandwiching the support body therebetween. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010199401(A) 申请公布日期 2010.09.09
申请号 JP20090044244 申请日期 2009.02.26
申请人 HITACHI MAXELL LTD 发明人 YAMAGUCHI NAOKI;FURUYA TAKAHIRO;KUZE SADAMU;OKADA MITSURU
分类号 H01L21/027;B29C59/04;B29L9/00 主分类号 H01L21/027
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