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发明名称
摘要
申请公布号	JP4541041(B2)	申请公布日期	2010.09.08
申请号	JP20040175232	申请日期	2004.06.14
申请人		发明人
分类号	H01L21/20;H01L21/268	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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