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发明名称
摘要
申请公布号	JP4539059(B2)	申请公布日期	2010.09.08
申请号	JP20030301149	申请日期	2003.08.26
申请人		发明人
分类号	H01B13/00;H05B33/02;B01J19/08;C23C16/40;H01B5/14;H01L51/50;H05B33/10;H05B33/14;H05B33/28	主分类号	H01B13/00
代理机构		代理人
主权项
地址

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