SUBSTRATES AND METHODS OF USING THOSE SUBSTRATES

摘要

PURPOSE: Substrates and method for using the same are provided to eliminate contaminants on the lowest surface of an immersion hood by moving the immersion hood toward a cleaning substrate. CONSTITUTION: A light illuminating system(IL) conditions radiation beams. A supporting structure(MT) supports a patterning device(MA). The supporting structure is connected with a first location setting device(PM) which accurately locates the pattern device. A substrate table(WT) is connected with a second location setting device(PW) which accurate locates a substrate(W). A projecting system(PL) images pattern in the radiation beams toward the target part(C) on the substrate.