发明名称 |
Optical measurement using fixed polarizer |
摘要 |
Optical measurement method and systems employing a fixed polarizer are disclosed. In one embodiment, the method includes providing at least one optical detection system having a fixed polarizer having a first type polarization; providing a first target on a substrate and a second target on the substrate; optically measuring the first target and the second target using the at least one optical detection system with the first target being positioned at a right angle relative to the second target to obtain a first measurement with the first type polarization and a second measurement with a second type-equivalent polarization; and combining the first measurement and the second measurement to obtain the optical measurement.
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申请公布号 |
US7791723(B2) |
申请公布日期 |
2010.09.07 |
申请号 |
US20080017151 |
申请日期 |
2008.01.21 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ARCHIE CHARLES N.;SENDELBACH MATTHEW J.;ZANGOOIE SHAHIN |
分类号 |
G01N0004/000000 |
主分类号 |
G01N0004/000000 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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