发明名称 |
Method and device for contacting a surface point on a workpiece |
摘要 |
A probe head having a probe head base and a stylus is provided for contacting a surface point on a workpiece. The stylus is moveable relative to the probe head base and has a defined rest position relative to the probe head base. For the contacting, the probe head is moved relative to the workpiece until the stylus touches the surface point with a defined contacting force. A correction data record representing a hysteresis behavior of the stylus with respect to the rest position is provided, and the contacting force is determined using the correction data record.
|
申请公布号 |
US7788820(B2) |
申请公布日期 |
2010.09.07 |
申请号 |
US20080267123 |
申请日期 |
2008.11.07 |
申请人 |
CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH |
发明人 |
AUBELE EUGEN;GRUPP GUENTER;BERNHARDT RALF;BENDZULLA KLAUS |
分类号 |
G01B5/004 |
主分类号 |
G01B5/004 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|