发明名称 Method of measuring dimension of film constituting element and apparatus therefor
摘要 A method of evaluating an element that includes the step of preparing a thin evaluation sample including a first portion in which a first layer containing a first material and a second layer containing a second material are laminated, a second portion containing the first material, and a third portion containing the second material; and calculating the thickness of the first layer in the first portion.
申请公布号 US7791024(B2) 申请公布日期 2010.09.07
申请号 US20080196440 申请日期 2008.08.22
申请人 FUJITSU LIMITED 发明人 MIYAJIMA TOYOO;KOTAKA YASUTOSHI
分类号 H01J37/26 主分类号 H01J37/26
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