发明名称 Laser mask and method of crystallization using the same
摘要 Provided is a method for crystallizing using a laser mask for selectively crystallizing active regions without a laser shot mark, including: providing an array substrate in which N×M active regions are defined; positioning a laser mask having first and second blocks over the substrate, wherein the first and second blocks have first and second mask patterns, respectively, and the second mask pattern is a reverse pattern of the first mask pattern; irradiating a first laser beam onto the active regions through the first block; and irradiating a second laser beam onto the active regions through the second block.
申请公布号 US7790341(B2) 申请公布日期 2010.09.07
申请号 US20080076120 申请日期 2008.03.13
申请人 LG DISPLAY CO., LTD. 发明人 YOU JAESUNG
分类号 G02F1/136;G03F1/00;B23K26/06;C30B28/08;H01L21/00;H01L21/027;H01L21/20;H01L21/77;H01L21/84 主分类号 G02F1/136
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