BIDIRECTIONAL ELECTROTHERMAL ELECTROMAGNETIC TORSIONAL MICROACTUATORS AND IT'S MANUFACTURING METHOD

摘要

PURPOSE: A micro-actuators for a bidirectional driven electrothermal device and a method of manufacturing the same are provided to drive a micro-mirror in bidirectional by applying electromagnetic field from the outside to control the direction of the fixed beam. CONSTITUTION: A mirror(102) comprises a reflecting surface. Incident light is reflected from the reflecting surface. Torsion bars(104a,104b) are arranged on the rotation center axis of the mirror. The torsion bars are connected to the both sides of the mirror. Torsion bar anchors supports the torsion bar. A pair of buckling beams are connected to the both sides of the mirror and are faced with each other. The buckling beam anchors support the buckling beam.