GUIDE APPARATUS OF LINEAR MOVEMENT UNIT USING LINEAR MOTOR

摘要

PURPOSE: A guide apparatus of a linear movement unit is provided to transfer a stage without friction by maintaining a gap between an air exhaust surface of an air bearing and a guide surface of a guide unit. CONSTITUTION: A stage(20) moves on a base member. First and second linear motors are arranged on both sides of the base member to generate the driving force of the stage. The guide surface of a guide unit(50) is formed on the base member according to the movement direction of the stage. One end of an operation member(60) is slidably combined with the stage. The air bearing has an air exhaust surface. An elastic support unit(80) is arranged between the air bearing and the stage to constantly maintain the gap between the guide surface and the air exhaust surface.