| 摘要 |
PURPOSE: A silicon retrieving method is provided to retrieve the silicon using bubble generated by the air supply after hydrophobicizing the silicon by supplying hydrogen fluoride to the water containing the silicon generated during the semiconductor manufacturing process. CONSTITUTION: A main body(100) is used as a container containing the water having the silicon. A water supply pipe(120) supplies the water including the silicon to the main body inner side. A water exhaust line(130) discharges the water separated from the silicon to the outside. First and second water level sensors(140a, 140b) measure the water level contained in the main body of number.
|
