Jet head comprises vacuum housing, in which electron source is arranged, and jet finger is connected with vacuum housing, where discharge port is provided at distal end

摘要

The jet head comprises a vacuum housing (1), in which an electron source (2) is arranged. A jet finger (3) is connected with the vacuum housing, where a discharge port (5) is provided at a distal end (4). The discharge port is made from a material with certain atomic number (Z), where the material is selected from the group, beryllium, carbon, aluminum or silicon. The material for the discharge port is provided with a material resistant compound of carbon, oxygen or nitrogen. The jet finger is made of stainless steel.