发明名称 |
Verfahren zur Prozesssteuerung auf Ebene der Verbindungsstrukturen, die eine Durchführung umfassen |
摘要 |
<p>A method and an apparatus for performing process control at an interconnect level. A process step upon a workpiece is performed. Manufacturing data relating to an interconnect location on the workpiece is acquired. An interconnect characteristic control process is performed based upon the manufacturing data. The interconnect characteristic control process includes controlling a process relating to a structure associated with the interconnect location on the workpiece to control a characteristic relating to the interconnect location.</p> |
申请公布号 |
DE10393397(B4) |
申请公布日期 |
2010.09.02 |
申请号 |
DE2003193397 |
申请日期 |
2003.09.19 |
申请人 |
ADVANCED MICRO DEVICES INC. |
发明人 |
CHONG, ROBERT J.;GREEN, ERIC O. |
分类号 |
H01L21/66;G05B19/418;H01L21/768 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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