WIDTH ADJUSTMENT UNIT OF PLASMA CLEANING APPARATUS

摘要

PURPOSE: An apparatus for adjusting the width of an electrode surface of a plasma processing is provided to automatically adjust the width of the electrode surface by moving a mobile plate. CONSTITUTION: A guide ring(6) is combined with the inside of a vacuum chamber(2). A mobile plate(7) is composed of a frame and a plurality of mobile bars. The plurality of mobile bars is arranged on the frame. A plurality of fixing guides(4) is fixed on the upper side of the vacuum chamber. A connecting unit(9) is arranged on the tip-end of the mobile plate. The connecting unit is connected with the rod of a servo cylinder. The mobile plate is automatically moved by the servo cylinder.