| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor that is superior in impact resistance and suppresses degradation of detection characteristics of accelerations. <P>SOLUTION: A damping structure 80 is provided to a portion other than a fixed electrode 41 and a movable electrode 21, so that the regulation of damping can be performed by means of the damping structure 80 without reducing an electrode-to-electrode gap 70 between the fixed electrode 41 and the movable electrode 21. Accordingly, it is possible to provide the acceleration sensor 100 that can suppress destruction on collision between a movable section 20 and a support 10 so as to enhance impact resistance, detect an acceleration while avoiding collision between the fixed electrode 41 and the movable electrode 21, and prevent the detection characteristics of the acceleration from being reduced. <P>COPYRIGHT: (C)2010,JPO&INPIT |
