发明名称 LAMINATING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a laminating device having a relatively simple structure. <P>SOLUTION: The laminating device 1 for laminating a body to be laminated M includes a heater plate for heating the body M, a support member 36 that is arranged above the heater plate and is moved up and down relative to the heater plate, and a diaphragm 35 supported by the support member 36. The diaphragm 35 is supported with its top face always opened to the atmospheric pressure, and has an exhaust channel through which the air is exhausted from a region between the top face of the heater plate and the diaphragm 35 when the support member 36 is lowered relative to the heater plate. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010192638(A) 申请公布日期 2010.09.02
申请号 JP20090034912 申请日期 2009.02.18
申请人 NPC INC 发明人 YANAI TOSHIYUKI;KUMAMOTO SUEHIRO;TONARI YOSHIRO
分类号 H01L31/042 主分类号 H01L31/042
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