| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the yield of a product manufactured by a processing system for a substrate by suppressing sticking of particles on the substrate when the substrate is conveyed. Ž<P>SOLUTION: A substrate conveying device includes a substrate holding part 91 for holding the substrate and a lifting mechanism 93 for lifting and lowering the substrate holding part 91 in a vertical direction. On a substrate holding surface 91b of the substrate holding part 91, a plurality of gas jetting holes 100 for jetting a predetermined gas upward are formed. A driving source for the lifting mechanism is a linear motor. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
