| 发明名称 |
APPARATUS AND METHOD FOR TESTING A CAPACITIVE TRANSDUCER AND/OR ASSOCIATED ELECTRONIC CIRCUITRY |
| 摘要 |
A method of testing a capacitive transducer circuit, for example a MEMS capacitive transducer, by applying a test signal via one or more capacitors provided in the transducer circuit.
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| 申请公布号 |
US2010219839(A1) |
申请公布日期 |
2010.09.02 |
| 申请号 |
US20090649623 |
申请日期 |
2009.12.30 |
| 申请人 |
STEELE COLIN FINDLAY;PENNOCK JOHN LAURENCE |
发明人 |
STEELE COLIN FINDLAY;PENNOCK JOHN LAURENCE |
| 分类号 |
G01R31/12;H01L21/66;H01L27/06 |
主分类号 |
G01R31/12 |
| 代理机构 |
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