SCRIBING APPARATUS AND SCRIBING METHOD

摘要

A small-sized brittle material substrate is scribed with excellent workability. A plurality of brittle material substrates (107a-107i) are respectively aligned and arranged on a table (106) with aligning pins (109). A recipe data table is previously stored for each brittle material substrate. Based on the recipe data table, the brittle material substrates and a scribe head are relatively moved and inner cut scribing and outer cut scribing are performed to each substrate. Thus, the scribing operation can be automatically performed to the plurality of substrates at one time.