| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of smoothening the surface of a glass substrate having concave defects with the brief irradiation of laser beams and reducing burdens to a laser irradiation device to be used. <P>SOLUTION: In the method, a fluorinating agent is allowed to be contact with the surface of the glass substrate in a gas phase, thereby, fluorine atoms are introduced to the surface layer including the surface of the glass substrate, thereafter, laser beams of the wavelength region having absorption for glass material constituting the glass substrate and, thereby, the surface of the glass substrate having a concave defect is smoothened. <P>COPYRIGHT: (C)2010,JPO&INPIT |
