| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate processing system that causes different display units to output different displays, and causes different operations to be carried out from different operation screens. <P>SOLUTION: A substrate processing system 1, on login information of a user being input from a main display device 18, refers to the login information, a user group parameter, with which is set a group to which the user belongs, and an authority parameter, which sets an authority of the group, and causes the main display device 18 to display a main operation screen 18a corresponding to the user, while it, on login information of a user being input from an external operating apparatus 30, causes an external display device 32 to display an external parameter setting screen 32b for setting an authority parameter of a group to which the user belongs, or to display an external operation screen 32a corresponding to the group to which the user belongs. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
