| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem that, if a temperature change occurs outside a sealed container, gas convection occurs inside the sealed container, variations in temperature value to be measured appear, and reduced pressure to be calculated also varies. <P>SOLUTION: A temperature sensor is installed outside a sealed container. A reduced pressure converted into a prescribed temperature is calculated by a temperature value measured at arbitrary time and a pressure value measured after a prescribed delay time from the arbitrary time. Effects of gas convection inside the sealed container are avoided in order to obtain a stable reduced pressure. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
