| 摘要 |
PROBLEM TO BE SOLVED: To provide a power supply device for a turbo molecular pump which can achieve both the downsizing of the power supply device and the facilitation of confirmation of set data. SOLUTION: The device includes one LED 305 capable of selectively emitting light in either of a first or second color. When displaying set data consisting of a set value related to the turbo molecular pump operation and an item number added to the set value, the item number and set value are displayed by a first light emitting pattern for turning on and off light in the first color and by a second light emitting pattern for turning on and off light in the second color, respectively, thereby achieving both the downsizing of the power supply device and the facilitation of confirmation of the set data. COPYRIGHT: (C)2010,JPO&INPIT |
