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发明名称
Dielectric storage memory cell MONOS having high permittivity top dielectric and method therefor
摘要
申请公布号
KR100979661(B1)
申请公布日期
2010.09.02
申请号
KR20057003561
申请日期
2003.07.24
申请人
发明人
分类号
H01L27/10;H01L27/115;H01L21/336;H01L21/8246;H01L21/8247;H01L29/788;H01L29/792
主分类号
H01L27/10
代理机构
代理人
主权项
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