| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a holding device, an optical system, and an exposure device, which hold a plurality of mirror elements without lowering performance as an optical member, and also to provide a method for manufacturing a device. <P>SOLUTION: An incidence side fly-eye mirror 21 is provided with: a base member 40 having a planer installation surface 41; and a plurality of mirror elements 42 arranged so that an attachment plane is attached firmly to the installation surface 41. The mirror element 42 is regulated to move toward a first direction A while a regulation member 46 arranged on the installation surface 41 is housed in the housing recessed portion. The mirror element 42 is regulated to move toward a second direction B while it is held by a pair of contact portions 50, 51 arranged on both sides in the second direction B. The mirror element 42 is fixed while being energized toward the base member 40 side. <P>COPYRIGHT: (C)2010,JPO&INPIT |
