| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system and a substrate for detecting the temperature information of a substrate capable of measuring a temperature even if the substrate is in a high-temperature state of ≥145°C, and enabling the extraction of the temperature information from a process treatment chamber without using a cable. Ž<P>SOLUTION: The element having an LC resonant circuit with a capacitor (C) and an inductor (L) on a substrate and having a gap in which capacitance is easily changed by the warpage of a one-side electrode of the capacitor depending on a temperature is installed. The temperature information is extracted as an LC resonant frequency from a probe antenna installed in the process treatment chamber and converted into temperature indication. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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