| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface roughening device for a build-up substrate insulating layer, which enables uniform surface roughening. SOLUTION: Provided is the surface roughening device for the build-up substrate insulating layer, of a liquid circulation type such that an etchant 1 having been used once is guided into an electrolytic recycling tank 6 through a conduit 81 to be recycled, and put back into a processing tank 2 from support ports through a conduit 51, wherein a processing tank is substantially in a shape of a rectangular parallelepiped, a supply pipe 5 is provided between one of side surfaces perpendicular to a surface of a substrate 3 to be processed in the processing tank and the substrate in parallel to the side surface, the supply pipe is provided with a plurality of supply ports on side surface sides and also provided with one discharge port 8 at an upper part of the other side surface in the processing tank, and straightening members A and B are provided between the substrate and supply pipe, and between the substrate and the side surface of the processing tank on the side where the discharge port is provided, so that the etchant is caused to flow from the supply ports to the discharge port in a direction perpendicular to the side surfaces. COPYRIGHT: (C)2010,JPO&INPIT
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