发明名称 |
POLYCRYSTALLINE SILICON AND METHOD FOR THE PRODUCTION THEREOF |
摘要 |
Brittle polysilicon rods having a rod cross-section of 80-99% available for electrical conduction and a flexural strength of 0.1 to 80 N/mm2 are produced by a process wherein the temperature of the bridge of polysilicon rods in the Siemens process is held at a high temperature and the flow rate of chlorosilanes is increased to the maximum within a short time. The rods are easily fragmented with low force, resulting in polysilicon with a low level of metallic impurities.
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申请公布号 |
US2010219380(A1) |
申请公布日期 |
2010.09.02 |
申请号 |
US20080680322 |
申请日期 |
2008.09.22 |
申请人 |
WACKER CHEMIE AG |
发明人 |
HERTLEIN HARALD;KRAETZSCHMAR OLIVER |
分类号 |
H01B1/04;C01B33/00;C23C16/24;C23C16/44 |
主分类号 |
H01B1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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