PREPARATION METHOD OF NIO-YSZ THIN FILM

摘要

PURPOSE: A method for preparation of a NiO-YSZ thin film is provided to change an oxide thin film of a porous structure into a dense structure and an amorphous crystal structure into a perovskite structure according to process conditions. CONSTITUTION: A method for preparation of a NiO-YSZ thin film comprises steps of: dissolving a nickel precursor, a yttrium precursor and a zirconium precursor in a solvent to prepare a precursor solution; carrying the precursor solution to an electric field atomizer and injecting it into a nozzle; spraying the precursor solution through the nozzle in an electric field so as to form droplets; and uniformly adsorbing the droplets onto a preheated substrate and drying it.