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发明名称
Vorrichtung zur Strukturierung von Festkörperflächen mit Ionenstrahlen aus einem Ionenstrahlspektrum
摘要
申请公布号
DE202010009379(U1)
申请公布日期
2010.09.02
申请号
DE201020009379U
申请日期
2010.06.22
申请人
DREEBIT GMBH
发明人
分类号
H01J37/30;H01J37/065;H01J37/08;H01J37/12
主分类号
H01J37/30
代理机构
代理人
主权项
地址
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