| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress occurrence of noise at the time of driving by a burst wave drive signal, and to allow jog feeding in submicron order. <P>SOLUTION: The jogging mechanism includes a fixed stage 1, a moving body 3 which is movable and supported by the fixed stage 1, an ultrasonic motor 6 which moves the moving body 3 and the fixed stage 1 in a relative manner, and a control device 9 for outputting a drive signal of the ultrasonic motor 6. Here, the drive signal of the ultrasonic motor 6 means the drive signals of two kinds, having the same frequency and different phases. The two kinds of drive signals are different in maximum amplitude at jog driving and maximum amplitude at normal driving. At the time of jog driving, the maximum amplitude of one drive signal is different from that of the other drive signal. <P>COPYRIGHT: (C)2010,JPO&INPIT |
