| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope and an image acquiring method acquiring a Z stack image with less blurring even if vibration or the like occurs when acquiring the Z stack image. SOLUTION: A predetermined electrical signal is periodically and accumulatively added to a control signal used for autofocus control to change a focusing position between an objective lens and a surface to be inspected of a sample to a predetermined interval in an optical axis direction, and the objective lens or a stage is moved following a change in the focusing position. A plurality of images of the sample are acquired by causing an imaging apparatus to photograph the sample every time a reference surface to be inspected of the sample is positioned at respective focusing positions. COPYRIGHT: (C)2010,JPO&INPIT |
